Semiconductor
eNC V80T Functional Coating
Items |
Description |
Nozzle |
3ea |
Coating Stage |
800 x 1100mm |
HV Unit |
Up to 25kV CTRL by Micro-Controller |
Plasma Module |
RF Plasma(Ar,O2) |
Dimension |
4,650 x 2,000 x 1,800mm |
Weight |
2,000kg |
Description
- Reliable chemical supply system (CSS)
- Easy nozzle replacement & repair system
- High compatibility with various ink materials.
- GUI(Graphical User Interface) Program
- Saving materials by improving delivery rate